검색결과 : 1건
No. | Article |
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1 |
Plasma cleaning and nitridation of sapphire substrates for AlxGa1-xN epitaxy as studied by x-ray photoelectron diffraction Seelmann-Eggebert M, Zimmermann H, Obloh H, Niebuhr R, Wachtendorf B Journal of Vacuum Science & Technology A, 16(4), 2008, 1998 |