화학공학소재연구정보센터
검색결과 : 6건
No. Article
1 Nanostructured Polymer Brushes by UV-Assisted Imprint Lithography and Surface-Initiated Polymerization for Biological Functions
Benetti EM, Acikgoz C, Sui XF, Vratzov B, Hempenius MA, Huskens J, Vancso GJ
Advanced Functional Materials, 21(11), 2088, 2011
2 High resolution lithography with PDMS molds
Bender M, Plachetka U, Ran J, Fuchs A, Vratzov B, Kurz H, Glinsner T, Lindner F
Journal of Vacuum Science & Technology B, 22(6), 3229, 2004
3 Interferometric in situ alignment for UV-based nanoimprint
Fuchs A, Vratzov B, Wahlbrink T, Georgiev Y, Kurz H
Journal of Vacuum Science & Technology B, 22(6), 3242, 2004
4 Electrical characterization of 12 nm EJ-MOSFETs on SOI substrates
Henschel W, Wahlbrink T, Georgiev YM, Lemme M, Mollenhauer T, Vratzov B, Fuchs A, Kurz H, Kittler M, Schwierz F
Solid-State Electronics, 48(5), 739, 2004
5 Large scale ultraviolet-based nanoimprint lithography
Vratzov B, Fuchs A, Lemme M, Henschel W, Kurz H
Journal of Vacuum Science & Technology B, 21(6), 2760, 2003
6 Fabrication of 12 nm electrically variable shallow junction metal-oxide-semiconductor field effect transistors on silicon on insulator substrates
Henschel W, Wahlbrink T, Geogriev YM, Lemme M, Mollenhauer T, Vratzov B, Fuchs A, Kurz H
Journal of Vacuum Science & Technology B, 21(6), 2975, 2003