검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Impact of silica-substrate chemistry on tantalum nitride thin films deposited by atomic layer deposition: Microstructure, chemistry and electrical behaviors Volpi F, Cadix L, Berthome G, Coindeau S, Encinas T, Jourdan N, Blanquet E Thin Solid Films, 669, 392, 2019 |
| 2 |
Elastic properties of tensile nitrogen-plasma-treated multilayer silicon nitride films Braccini M, Volpi F, Devos A, Raymond G, Benoit D, Morin P Thin Solid Films, 551, 120, 2014 |
| 3 |
Gaseous Phase Study of the Zr-Organometallic ALD Precursor TEMAZ by Mass Spectrometry Monnier D, Nuta I, Chatillon C, Gros-Jean M, Volpi F, Blanquet E Journal of the Electrochemical Society, 156(1), H71, 2009 |
| 4 |
Nucleation and evolution of Si1-xGex islands on Si(001) Volpi F, Portavoce A, Ronda A, Shi Y, Gay JM, Berbezier I Thin Solid Films, 380(1-2), 46, 2000 |
| 5 |
Sb segregation in Si and SiGe: effect on the growth of self-organised Ge dots Portavoce A, Volpi F, Ronda A, Gas P, Berbezier I Thin Solid Films, 380(1-2), 164, 2000 |