검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Microwave Interferometry of Chemically Active Plasma of RF Discharge in Mixtures Based on Fluorides of Silicon and Germanium Kornev RA, Sennikov PG, Sintsov SV, Vodopyanov AV Plasma Chemistry and Plasma Processing, 37(6), 1655, 2017 |
| 2 |
Deposition of microcrystalline silicon in electron-cyclotron resonance discharge (24 GHz) plasma from silicon tetrafluoride precursor Mansfeld DA, Vodopyanov AV, Golubev SV, Sennikov PG, Mochalov LA, Andreev BA, Drozdov YN, Drozdov MN, Shashkin VI, Bulkine P, Cabarrocas PRI Thin Solid Films, 562, 114, 2014 |