검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Microwave plasma enhanced CVD of aluminum oxide films: OES diagnostics and influence of the RF bias Tristant P, Ding Z, Vinh QBT, Hidalgo H, Jauberteau JL, Desmaison J, Dong C Thin Solid Films, 390(1-2), 51, 2001 |
| No. | Article |
|---|---|
| 1 |
Microwave plasma enhanced CVD of aluminum oxide films: OES diagnostics and influence of the RF bias Tristant P, Ding Z, Vinh QBT, Hidalgo H, Jauberteau JL, Desmaison J, Dong C Thin Solid Films, 390(1-2), 51, 2001 |