검색결과 : 3건
No. | Article |
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1 |
High-temperature stability of the mechanical and optical properties of Si-B-C-N films prepared by magnetron sputtering Kalas J, Vernhes R, Hreben S, Vlcek J, Klemberg-Sapieha JE, Martinu L Thin Solid Films, 518(1), 174, 2009 |
2 |
Optical and chemical characterization of expanding thermal plasma-deposited carbon-containing silicon dioxide-like films Creatore M, Rieter SM, Barrell Y, Van De Sanden MCM, Vernhes R, Martinu L Thin Solid Films, 516(23), 8547, 2008 |
3 |
Interface engineering during plasma-enhanced chemical vapor deposition of porous/dense SiN1.3 optical multilayers Amassian A, Vernhes R, Klemberg-Sapieha JE, Desjardins P, Martinu L Thin Solid Films, 469-470, 47, 2004 |