화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 High-temperature stability of the mechanical and optical properties of Si-B-C-N films prepared by magnetron sputtering
Kalas J, Vernhes R, Hreben S, Vlcek J, Klemberg-Sapieha JE, Martinu L
Thin Solid Films, 518(1), 174, 2009
2 Optical and chemical characterization of expanding thermal plasma-deposited carbon-containing silicon dioxide-like films
Creatore M, Rieter SM, Barrell Y, Van De Sanden MCM, Vernhes R, Martinu L
Thin Solid Films, 516(23), 8547, 2008
3 Interface engineering during plasma-enhanced chemical vapor deposition of porous/dense SiN1.3 optical multilayers
Amassian A, Vernhes R, Klemberg-Sapieha JE, Desjardins P, Martinu L
Thin Solid Films, 469-470, 47, 2004