검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Influence of hydrogen plasma surface treatment of Si substrate on nickel silicide formation Vengurlekar A, Balasubramanian S, Ashok S, Theodore D, Chi DZ Journal of Vacuum Science & Technology B, 24(3), 1449, 2006 |
| 2 |
Enhancement of He-induced cavities in silicon by hydrogen plasma treatment Liu CL, Ntsoenzok E, Vengurlekar A, Ashok S, Alquier D, Ruault MO, Dubois C Journal of Vacuum Science & Technology B, 23(3), 990, 2005 |