검색결과 : 1건
No. | Article |
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1 |
Reactive-ion etching of high-Q and submicron-diameter GaAs/AlAs micropillar cavities Varoutsis S, Laurent S, Sagnes I, Lemaitre A, Ferlazzo L, Meriadec C, Patriarche G, Robert-Philip I, Abram I Journal of Vacuum Science & Technology B, 23(6), 2499, 2005 |