검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Quarter-Micron Lithography with a Wet-Silylated and Dry-Developed Commercial Photoresist Gogolides E, Tzevelekis D, Tsoi E, Hatzakis M, Goethals AM, Baik KH, Vanroey F Journal of Vacuum Science & Technology B, 12(6), 3914, 1994 |