검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Time-dependent exposure dose of hydrogen silsesquioxane when used as a negative electron-beam resist Clark N, Vanderslice A, Grove R, Krchnavek RR Journal of Vacuum Science & Technology B, 24(6), 3073, 2006 |
| No. | Article |
|---|---|
| 1 |
Time-dependent exposure dose of hydrogen silsesquioxane when used as a negative electron-beam resist Clark N, Vanderslice A, Grove R, Krchnavek RR Journal of Vacuum Science & Technology B, 24(6), 3073, 2006 |