화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Errors in near-surface and interfacial profiling of boron and arsenic
Vandervorst W, Janssens T, Brijs B, Conard T, Huyghebaert C, Fruhauf J, Bergmaier A, Dollinger G, Buyuklimanli T, VandenBerg JA, Kimura K
Applied Surface Science, 231-2, 618, 2004
2 In-Situ Study of Processes Taking Place on Silicon Surface During Its Bombardment by Cfx/Ar Ions - Etching Versus Polymerization
Sikola T, Armour DG, Vandenberg JA
Journal of Vacuum Science & Technology A, 14(6), 3156, 1996