검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Surface reaction kinetics of metal beta-diketonate precursors with O radicals in radical-enhanced atomic layer deposition of metal oxides Van TT, Chang JP Applied Surface Science, 246(1-3), 250, 2005 |
| No. | Article |
|---|---|
| 1 |
Surface reaction kinetics of metal beta-diketonate precursors with O radicals in radical-enhanced atomic layer deposition of metal oxides Van TT, Chang JP Applied Surface Science, 246(1-3), 250, 2005 |