검색결과 : 53건
| No. | Article |
|---|---|
| 1 |
Metal-Insulator Transition in ALD VO2 Ultrathin Films and Nanoparticles: Morphological Control Peter AP, Martens K, Rampelberg G, Toeller M, Ablett JM, Meersschaut J, Cuypers D, Franquet A, Detavernier C, Rueff JP, Schaekers M, Van Elshocht S, Jurczak M, Adelmann C, Radu IP Advanced Functional Materials, 25(5), 679, 2015 |
| 2 |
Infrared molar absorption coefficient of H2O stretching modes in SiO2 Dekkers HFW, Gallo A, Van Elshocht S Thin Solid Films, 542, 8, 2013 |
| 3 |
Study of Chemical Vapor Deposition of Manganese on Porous SiCOH Low-k Dielectrics Using Bis(ethylcyclopentadienyl)manganese Jourdan N, Krishtab MB, Baklanov MR, Meersschaut J, Wilson CJ, Ablett JM, Fonda E, Zhao L, Van Elshocht S, Tokei Z, Vancoille E Electrochemical and Solid State Letters, 15(5), H176, 2012 |
| 4 |
Gadolinium -niobates and -tantalates: Amorphous High-k Materials by Aqueous CSD Dewulf D, Hardy A, Van Elshocht S, De Dobbelaere C, Wang WC, Badylevich M, Afanas'ev VV, De Gendt S, Van Bael MK Journal of the Electrochemical Society, 159(6), G75, 2012 |
| 5 |
Properties and thermal stability of solution processed ultrathin, high-k bismuth titanate (Bi2Ti2O7) films Hardy A, Van Elshocht S, De Dobbelaere C, Hadermann J, Pourtois G, De Gendt S, Afanas'ev VV, Van Bael MK Materials Research Bulletin, 47(3), 511, 2012 |
| 6 |
Development of ALD HfZrOx with TDEAH/TDEAZ and H2O Shi X, Tielens H, Takeoka S, Nakabayashi T, Nyns L, Adelmann C, Delabie A, Schram T, Ragnarsson L, Schaekers M, Date L, Schreutelkamp R, Van Elshocht S Journal of the Electrochemical Society, 158(1), H69, 2011 |
| 7 |
Ozone Based Atomic Layer Deposition of Hafnium Oxide and Impact of Nitrogen Oxide Species Delabie A, Swerts J, Van Elshocht S, Jung SH, Raisanen PI, Givens ME, Shero EJ, Peeters J, Machkaoutsan V, Maes JW Journal of the Electrochemical Society, 158(5), D259, 2011 |
| 8 |
Lanthanide Aluminates as Dielectrics for Non-Volatile Memory Applications: Material Aspects Adelmann C, Swerts J, Richard O, Conard T, Popovici M, Meersschaut J, Afanas'ev VV, Breuil L, Cacciato A, Opsomer K, Brijs B, Tielens H, Pourtois G, Bender H, Jurczak M, Van Houdt J, Van Elshocht S, Kittl JA Journal of the Electrochemical Society, 158(8), H778, 2011 |
| 9 |
Advanced PBTI reliability with 0.69 nm EOT GdHfO gate dielectric Cho M, Aoulaiche M, Degraeve R, Kaczer B, Kauerauf T, Ragnarsson LA, Adelmann C, Van Elshocht S, Hoffmann TY, Groeseneken G Solid-State Electronics, 63(1), 5, 2011 |
| 10 |
Ozone-Based Metal Oxide Atomic Layer Deposition: Impact of N-2/O-2 Supply Ratio in Ozone Generation Delabie A, Caymax M, Gielis S, Maes JW, Nyns L, Popovici M, Swerts J, Tielens H, Peeters J, Van Elshocht S Electrochemical and Solid State Letters, 13(6), II176, 2010 |