검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Permittivity and conductivity of low-dielectric-constant SiOC : H films deposited by plasma-enhanced chemical vapor deposition Gonon P, Sylvestre A, Meynen H, Van Cotthem L Journal of the Electrochemical Society, 150(3), F47, 2003 |