화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 On the difference between optically and electrically determined resistivity of ultra-thin titanium nitride films
Van Bui H, Kovalgin AY, Wolters RAM
Applied Surface Science, 269, 45, 2013
2 Growth Kinetics and Oxidation Mechanism of ALD TiN Thin Films Monitored by In Situ Spectroscopic Ellipsometry
Van Bui H, Groenland AW, Aarnink AAI, Wolters RAM, Schmitz J, Kovalgin AY
Journal of the Electrochemical Society, 158(3), H214, 2011