화학공학소재연구정보센터
검색결과 : 6건
No. Article
1 Vapor sorption in thin supported polymer films studied by white light interferometry
Manoli K, Goustouridis D, Chatzandroulis S, Raptis I, Valamontes ES, Sanopoulou M
Polymer, 47(17), 6117, 2006
2 Surface roughness induced by plasma etching of Si-containing polymers
Tserepi A, Gogolides E, Constantoudis V, Cordoyiannis G, Raptis I, Valamontes ES
Journal of Adhesion Science and Technology, 17(8), 1083, 2003
3 Etching behavior of Si-containing polymers as resist materials for bilayer lithography: The case of poly-dimethyl siloxane
Tserepi A, Cordoyiannis G, Patsis GP, Constantoudis V, Gogolides E, Valamontes ES, Eon D, Peignon MC, Cartry G, Cardinaud C, Turban G
Journal of Vacuum Science & Technology B, 21(1), 174, 2003
4 Characterization and simulation of surface and line-edge roughness in photoresists
Constandoudis V, Gogolides E, Patsis GP, Tserepi A, Valamontes ES
Journal of Vacuum Science & Technology B, 19(6), 2694, 2001
5 Surface and line-edge roughness in solution and plasma developed negative tone resists: Experiment and simulation
Patsis GP, Tserepi A, Raptis I, Glezos N, Gogolides E, Valamontes ES
Journal of Vacuum Science & Technology B, 18(6), 3292, 2000
6 Simulation of roughness in chemically amplified resists using percolation theory
Patsis GP, Glezos N, Raptis I, Valamontes ES
Journal of Vacuum Science & Technology B, 17(6), 3367, 1999