화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Study of the structure of titanium thin films deposited with a vacuumarc as a function of the thickness
Fazio M, Vega D, Kleiman A, Colombo D, Arias LMF, Marquez A
Thin Solid Films, 593, 110, 2015
2 Deposition and current conduction of mixed hexagonal and cubic phases of AlN/p-Si films prepared by vacuum arc discharge: Effect of deposition temperature
Abdallah B, Al-Khawaja S, Alkhawwam A, Ismail IM
Thin Solid Films, 562, 152, 2014
3 Grain structure in cathode spot trail of low vacuum arc discharge
Sugimoto M, Mirkarimov A, Pozharov S, Takeda K
Thin Solid Films, 457(1), 168, 2004