검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Effects of vacuum and inert gas annealing of ultrathin tantalum pentoxide films on Si(100) Mao AY, Son KA, White JM, Kwong DL, Roberts DA, Vrtis RN Journal of Vacuum Science & Technology A, 17(3), 954, 1999 |
| No. | Article |
|---|---|
| 1 |
Effects of vacuum and inert gas annealing of ultrathin tantalum pentoxide films on Si(100) Mao AY, Son KA, White JM, Kwong DL, Roberts DA, Vrtis RN Journal of Vacuum Science & Technology A, 17(3), 954, 1999 |