검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Actinic detection of sub-100 nm defects on extreme ultraviolet lithography mask blanks Jeong ST, Johnson L, Rekawa S, Walton CC, Prisbrey ST, Tejnil E, Underwood JH, Bokor J Journal of Vacuum Science & Technology B, 17(6), 3009, 1999 |
| 2 |
At-wavelength detection of extreme ultraviolet lithography mask blank defects Jeong ST, Idir M, Lin Y, Johnson L, Rekawa S, Jones M, Denham P, Batson P, Levesque R, Kearney P, Yan PY, Gullikson E, Underwood JH, Bokor J Journal of Vacuum Science & Technology B, 16(6), 3430, 1998 |
| 3 |
Study of Buried Interfaces by Soft-X-Ray Fluorescence Spectroscopy Excited by Synchrotron-Radiation Ederer DL, Carlisle JA, Jimenez J, Jia JJ, Osborn K, Callcott TA, Perera RC, Underwood JH, Terminello LJ, Asfaw A, Himpsel FJ Journal of Vacuum Science & Technology A, 14(3), 859, 1996 |