검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
High-resolution two-dimensional dopant characterization using secondary ion mass spectrometry Ukraintsev VA, Chen PJ, Gray JT, Machala CF, Magel LK, Chang MC Journal of Vacuum Science & Technology B, 18(1), 580, 2000 |
| 2 |
Control of polysilicon surface topography in a high selectivity chemical mechanical polishing process Fang SJ, Ukraintsev VA, U E, Edwards H, Steckenrider S Journal of the Electrochemical Society, 146(3), 1158, 1999 |
| 3 |
Strong effect of dopant concentration gradient an etching rate Ukraintsev VA, McGlothlin R, Gribelyuk MA, Edwards H Journal of Vacuum Science & Technology B, 16(1), 476, 1998 |
| 4 |
Silicon Crystal Heating and Thermocouple Mounting Designs Nishino H, Yang W, Dohnalek Z, Ukraintsev VA, Choyke WJ, Yates JT Journal of Vacuum Science & Technology A, 15(1), 182, 1997 |
| 5 |
A Statistical-Model for Activated Dissociative Adsorption - Application to Methane Dissociation on Pt(111) Ukraintsev VA, Harrison I Journal of Chemical Physics, 101(2), 1564, 1994 |