검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Study of ZrO2 thin films deposited at glancing angle by radio frequency magnetron sputtering under varying substrate rotation Tokas RB, Jena S, Misal JS, Rao KD, Polaki SR, Pratap C, Udupa DV, Thakur S, Kumar S, Sahoo NK Thin Solid Films, 645, 290, 2018 |
| 2 |
Effect of O-2/Ar gas flow ratio on the optical properties and mechanical stress of sputtered HfO2 thin films Jena S, Tokas RB, Misal JS, Rao KD, Udupa DV, Thakur S, Sahoo NK Thin Solid Films, 592, 135, 2015 |