검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Influence of polymer porogens on the porosity and mechanical properties of spin coated Ultra Low k dielectrics Jousseaume V, Rolland G, Babonneau D, Simon JP Thin Solid Films, 517(15), 4413, 2009 |
| 2 |
Thermal furnace and Ultraviolet assisted curing impact on SiOCH spin-on ultra low dielectric constant materials Zenasnia A, Remiat B, Waldfiied C, Le Cornec C, Jousseaume V, Passemard G Thin Solid Films, 516(6), 1097, 2008 |
| 3 |
Electronic structure characterization of ultra low-k carbon doped oxide using soft X-ray emission spectroscopy Reid I, Zhang Y, DeMasi A, Hughes G, Smith KE Thin Solid Films, 516(15), 4851, 2008 |
| 4 |
Crosslinking impact of mesoporous MSQ films used in microelectronic interconnections on mechanical properties Ciaramella F, Jousseaume V, Maitrejean S, Verdier M, Remiat B, Zenasni A, Passemard G Thin Solid Films, 495(1-2), 124, 2006 |