검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Role of O(D-1) in the oxidation of Si(100) Kaspar T, Tuan A, Tonkyn R, Hess WP, Rogers JW, Ono Y Journal of Vacuum Science & Technology B, 21(2), 895, 2003 |
| 2 |
Impact of nitrogen and/or fluorine implantation on deep-submicron Co-salicide process Chang TY, Lei TF, Chao TS, Chen SW, Kao LM, Chen SK, Tuan A, Su TP Solid-State Electronics, 46(8), 1097, 2002 |
| 3 |
Interface control in the chemical vapor deposition of titanium dioxide on silicon(100) Tuan A, Yoon M, Medvedev V, Ono Y, Ma Y, Rogers JW Thin Solid Films, 377-378, 766, 2000 |
| 4 |
Stabilizing dielectric constant of fluorine-doped SiO2 film by N2O and NH3 plasma post-treatment Mei YJ, Chang TC, Chang SJ, Pan FM, Chen MSK, Tuan A, Chou S, Chang CY Thin Solid Films, 308-309, 501, 1997 |