검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Towards intersubband quantum box lasers: Electron-beam lithography update Tsvid G, D'Souza M, Botez D, Hawkins B, Khandekar A, Kuech T, Zory P Journal of Vacuum Science & Technology B, 22(6), 3214, 2004 |
| 2 |
Line edge roughness of sub-100 nm dense and isolated features: Experimental study Ma YS, Tsvid G, Cerrina F Journal of Vacuum Science & Technology B, 21(6), 3124, 2003 |
| 3 |
Can proximity x-ray lithography print 35 nm features? Yes Khan M, Han G, Tsvid G, Kitayama T, Maldonado J, Cerrina F Journal of Vacuum Science & Technology B, 19(6), 2423, 2001 |