검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Impact of Reactive Ion Etching Induced Carbon Contamination on Oxidation of Silicon Tsuchiaki M, Kvitek RJ, Parks C, Murphy RJ, Ohiwa T, Watanabe T Journal of the Electrochemical Society, 143(7), 2378, 1996 |
| 2 |
A Study of the Oxidation Slow-Down Mechanism Induced by Carbon Contamination on Silicon Surface Tsuchiaki M, Bruno A, Tsunashima Y, Watanabe T Journal of the Electrochemical Society, 143(9), 2965, 1996 |