검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Direct Patterning of low-k hydrogen silsesquioxane using X-ray exposure technology Chang TC, Tsai TM, Liu PT, Mor YS, Chen CW, Sheu JT, Tsengb TY Electrochemical and Solid State Letters, 6(5), G69, 2003 |
| No. | Article |
|---|---|
| 1 |
Direct Patterning of low-k hydrogen silsesquioxane using X-ray exposure technology Chang TC, Tsai TM, Liu PT, Mor YS, Chen CW, Sheu JT, Tsengb TY Electrochemical and Solid State Letters, 6(5), G69, 2003 |