검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
The effect of low-pressure and plasma-enhanced chemical vapor deposited tetraethylorthosilicate oxide film on a boron implant profile Tsang YL, Fitzgibbon G Journal of the Electrochemical Society, 145(5), 1677, 1998 |
| 2 |
Investigation of Polyimide Residue Due to Reactive Ion Etching in O-2 Tsang YL, Miller C, Lii T Journal of the Electrochemical Society, 143(4), 1464, 1996 |
| 3 |
A Polyimide Removal Process for Die Sealed in Ceramic Package Tsang YL, Perrin D Journal of the Electrochemical Society, 142(6), 2047, 1995 |