검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Development, installation, and performance of the X-ray stepper JSAL 5C Leonard Q, Malueg D, Wallace J, Taylor JW, Dhuey S, Cerrina F, Boerger B, Selzer R, Yu M, Ma Y, Myers K, Trybendis M, Moon E, Smith HI Journal of Vacuum Science & Technology B, 23(6), 2896, 2005 |
| 2 |
Pattern placement correction methodology for 200 mm SCALPEL masks Ocola LE, Farrow RC, Kasica RJ, Caminos CG, Rutberg L, Fullowan RF, Teffeau K, Blakey MI, Peabody ML, Knurek CS, Bogart GR, Novembre AE, Liddle JA, Lercel M, Magg C, Collins K, Trybendis M, Cadwell N, Jeffer R, Dauksher WJ, Resnick DJ, Mancini D, Han SI, Masnyj Z, Smith K, Mangat PJS Journal of Vacuum Science & Technology B, 19(6), 2659, 2001 |
| 3 |
Fabrication of masks for electron-beam projection lithography Lercel M, Magg C, Barrett M, Collins K, Trybendis M, Caldwell N, Jeffer R, Bouchard L Journal of Vacuum Science & Technology B, 18(6), 3210, 2000 |