검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Batch process for atomic layer deposition of hafnium silicate thin films on 300-mm-diameter silicon substrates Okuyama Y, Barelli C, Tousseau C, Park S, Senzaki Y Journal of Vacuum Science & Technology A, 23(3), L1, 2005 |
| No. | Article |
|---|---|
| 1 |
Batch process for atomic layer deposition of hafnium silicate thin films on 300-mm-diameter silicon substrates Okuyama Y, Barelli C, Tousseau C, Park S, Senzaki Y Journal of Vacuum Science & Technology A, 23(3), L1, 2005 |