검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
X-ray diffraction determination of residual stresses in narrow copper interconnects with submicronic widths Sicardy O, Touet I, Arnaud L, Charlet F, Berger T Materials Science Forum, 347-3, 562, 2000 |
| No. | Article |
|---|---|
| 1 |
X-ray diffraction determination of residual stresses in narrow copper interconnects with submicronic widths Sicardy O, Touet I, Arnaud L, Charlet F, Berger T Materials Science Forum, 347-3, 562, 2000 |