검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Reduced Pressure Etching of Thermal Oxides in Anhydrous HF/Alcoholic Gas-Mixtures Torek K, Ruzyllo J, Grant R, Novak R Journal of the Electrochemical Society, 142(4), 1322, 1995 |
| 2 |
In-Situ Vapor-Phase Pregate Oxide Cleaning and Its Effects on Metal-Oxide-Semiconductor Device Characteristics Ma Y, Green ML, Torek K, Ruzyllo J, Opila R, Konstadinidis K, Siconolfi D, Brasen D Journal of the Electrochemical Society, 142(11), L217, 1995 |