화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 In-line small-spot X-ray fluorescence assessment of electroplating and chemical mechanical polishing
de Mussy JPG, Bottiglieri G, Heylen N, Carbonell L, O'Dell J, Agnihotri DK, Tokar A, Mazor I
Journal of the Electrochemical Society, 153(9), G851, 2006
2 In-line monitoring of advanced microelectronic processes using combined X-ray techniques
Wyon C, Delille D, Gonchond JP, Heider F, Kwakman L, Marthon S, Mazor I, Michallet A, Muyard D, Perino-Gallice L, Royer JC, Tokar A
Thin Solid Films, 450(1), 84, 2004
3 Microstructural characterization of gamma-TiAl base alloy by electron probe x-ray microanalysis and electron backscatter diffraction
Levin L, Tokar A, Berner A
Journal of Materials Science, 35(15), 3923, 2000