검색결과 : 7건
| No. | Article |
|---|---|
| 1 |
On the phase identification of dc magnetron sputtered Pt-Ru alloy thin films Warren AP, Todi RM, Yao B, Barmak K, Sundaram KB, Coffey KR Journal of Vacuum Science & Technology A, 26(5), 1208, 2008 |
| 2 |
Effect of N-2/Ar gas mixture composition on the chemistry of SiCBN thin films prepared by RF reactive sputtering Vijayakumar A, Todi RM, Sundaram KB Journal of the Electrochemical Society, 154(4), H271, 2007 |
| 3 |
Oxygen annealing characterization of reactively sputtered SiCBN thin films by x-ray photoelectron spectroscopy Vijayakumar A, Todi RM, Sundaram KB Journal of the Electrochemical Society, 154(7), H547, 2007 |
| 4 |
In situ high temperature electrical characterization of RF sputtered SiCBN thin films Vijayakumar A, Todi RM, Todi VO, Sundaram KB Journal of the Electrochemical Society, 154(10), H875, 2007 |
| 5 |
X-ray photoelectron spectroscopy analysis of oxygen annealed radio frequency sputter deposited SiCN thin films Todi RM, Warren AP, Sundaram KB, Coffey KR Journal of the Electrochemical Society, 153(7), G640, 2006 |
| 6 |
Investigation of oxygen annealing effects on RF sputter deposited SiC thin films Todi RM, Sundaram KB, Warren AP, Scammon K Solid-State Electronics, 50(7-8), 1189, 2006 |
| 7 |
Comparison of the agglomeration behavior of thin metallic films on SiO2 Gadkari PR, Warren AP, Todi RM, Petrova RV, Coffey KR Journal of Vacuum Science & Technology A, 23(4), 1152, 2005 |