검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
High temperature subatmospheric chemical vapor deposited undoped silicate glass - A solution for next generation shallow trench isolation Xia LQ, Nemani S, Galiano M, Pichai S, Chandran S, Yieh E, Cote D, Conti R, Restaino D, Tobben D Journal of the Electrochemical Society, 146(3), 1181, 1999 |