검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Solubility of titanium diisopropoxide bis(dipivaloylmethanate) complex in supercritical carbon dioxide and its effect on supercritical fluid deposition process Uchida H, Sekino K, Hayakawa Y, Koda S Journal of Supercritical Fluids, 66, 59, 2012 |
| 2 |
Low temperature deposition of titanium oxide containing thin films in trench features from titanium diisopropoxide bis(dipivaloylmethanate) in supercritical CO2 Kano F, Uchida H, Koda S Journal of Supercritical Fluids, 50(3), 313, 2009 |