검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Loop Type of Inductively Coupled Thermal Plasmas System for Rapid Two-Dimensional Oxidation of Si Substrate Surface Tsuchiya T, Tanaka Y, Maruyama Y, Fujita A, Tial MKS, Uesugi Y, Ishijima T, Yukimoto T, Kawaura H Plasma Chemistry and Plasma Processing, 38(3), 599, 2018 |
| 2 |
Uniform Surface Oxidation of an Si Substrate by a Planar Modulated Inductively Coupled Thermal Plasma with Molecular Gas Feed Tial MKS, Tanaka Y, Maruyama Y, Tsuchiya T, Uesugi Y, Ishijima T Plasma Chemistry and Plasma Processing, 37(3), 857, 2017 |