검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Evaluation of hybrid lithography and mix and match scenarios for electron beam direct write applications Hohle C, Arndt C, Choi KH, Kretz J, Lutz T, Thrum F, Keil K Journal of Vacuum Science & Technology B, 25(6), 2038, 2007 |