화학공학소재연구정보센터
검색결과 : 5건
No. Article
1 Thermally-induced failures of copper through-silicon via structures evaluated by the strain energy density model
Han CF, Lin JF
Thin Solid Films, 615, 281, 2016
2 Wetting process of copper filling in through silicon vias
Zhang JH, Luo W, Li Y, Gao LM, Li M
Applied Surface Science, 359, 736, 2015
3 Stress measurements in tungsten coated through silicon vias for 3D integration
Krauss C, Labat S, Escoubas S, Thomas O, Carniello S, Teva J, Schrank F
Thin Solid Films, 530, 91, 2013
4 Failure mechanism of copper through-silicon vias under biased thermal stress
Seo SH, Hwang JS, Yang JM, Hwang WJ, Song JY, Lee WJ
Thin Solid Films, 546, 14, 2013
5 Three-dimensional integration in microelectronics: Motivation, processing, and thermomechanical modeling
Cale TS, Lu JQ, Gutmann RJ
Chemical Engineering Communications, 195(8), 847, 2008