검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Role of Electron-Ion Dissociative Recombination in CH4 Microwave Plasma on Basis of Simulations and Measurements of Electron Energy Minea T, van de Steeg AW, Wolf B, da Silva AS, Peeters FJJ, van den Bekerom DCM, Butterworth T, Ong Q, van de Sanden MCM, van Rooij GJ Plasma Chemistry and Plasma Processing, 39(5), 1275, 2019 |
| 2 |
Measurements of electron energy probability functions in helicon discharge by laser Thomson scattering Seo BH, You SJ, Kim JH, Seong DJ, Shin YH, Chang HY Thin Solid Films, 547, 52, 2013 |
| 3 |
Development of high-efficiency laser Thomson scattering measurement system for the investigation of EEDF in surface wave plasma Aramaki M, Kobayashi J, Kono A, Stamate E, Sugai H Thin Solid Films, 506, 679, 2006 |