검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Ultrathin membrane masks for electron projection lithography Wood OR, Trybula WJ, Greschner J, Kalt S, Bayer T, Shimizu S, Yamamoto H, Suzuki K, Gordon MS, Robinson CF, Dhaliwal RS, Thiel CW, Caldwell N, Lawliss MS, Huang C Journal of Vacuum Science & Technology B, 22(6), 3072, 2004 |
| 2 |
Benchmarking stencil reticles for electron projection lithography Wood OR, Trybula WJ, Lercel MJ, Thiel CW, Lawliss MJ, Edinger K, Stanishevsky A, Shimizu S, Kawata S Journal of Vacuum Science & Technology B, 21(6), 3072, 2003 |