검색결과 : 1건
No. | Article |
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1 |
Determination of the Dill parameters of thick positive resist for use in modeling applications Roeder G, Liu S, Aygun G, Evanschitzky P, Erdmann A, Schellenberger M, Pfitzner L Thin Solid Films, 519(9), 2978, 2011 |
No. | Article |
---|---|
1 |
Determination of the Dill parameters of thick positive resist for use in modeling applications Roeder G, Liu S, Aygun G, Evanschitzky P, Erdmann A, Schellenberger M, Pfitzner L Thin Solid Films, 519(9), 2978, 2011 |