검색결과 : 1건
No. | Article |
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1 |
Influence of the Oxidant on the Chemical and Field-Effect Passivation of Si by ALD Al2O3 Dingemans G, Terlinden NM, Pierreux D, Profijt HB, van de Sanden MCM, Kessels WMM Electrochemical and Solid State Letters, 14(1), H1, 2011 |