검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Characterization of scratches generated by a multiplaten copper chemical-mechanical polishing process Teo TY, Goh WL, Lim VSK, Leong LS, Tse TY, Chan L Journal of Vacuum Science & Technology B, 22(1), 65, 2004 |
| No. | Article |
|---|---|
| 1 |
Characterization of scratches generated by a multiplaten copper chemical-mechanical polishing process Teo TY, Goh WL, Lim VSK, Leong LS, Tse TY, Chan L Journal of Vacuum Science & Technology B, 22(1), 65, 2004 |