검색결과 : 28건
| No. | Article |
|---|---|
| 1 |
Chemical modification of the electronic conducting states in polymer nanodevices Zhitenev NB, Sidorenko A, Tennant DM, Cirelli RA Nature Nanotechnology, 2(4), 237, 2007 |
| 2 |
Spatial light modulator for maskless optical projection lithography Watson GP, Aksyuk V, Simon ME, Tennant DM, Cirelli RA, Mansfield WM, Pardo F, Lopez DO, Bolle CA, Papazian AR, Basavanhally N, Lee J, Fullowan R, Klemens F, Miner J, Kornblit A, Sorsch T, Fetter L, Peabody M, Bower JE, Weiner JS, Low YL Journal of Vacuum Science & Technology B, 24(6), 2852, 2006 |
| 3 |
Orientation dependence of linewidth variation in sub-50-nm Gaussian e-beam lithography and its correction Lu M, Tennant DM, Jacobsen CJ Journal of Vacuum Science & Technology B, 24(6), 2881, 2006 |
| 4 |
Nanoscale patterning in application to materials and device structures Erbe A, Jiang W, Bao Z, Abusch-Magder D, Tennant DM, Garfunkel E, Zhitenev N Journal of Vacuum Science & Technology B, 23(6), 3132, 2005 |
| 5 |
Comparison of tilting and piston mirror elements for 65 nm node spatial light modulator optical maskless lithography Watson GP, Aksyuk V, Tennant DM, Cirelli RA Journal of Vacuum Science & Technology B, 22(6), 3038, 2004 |
| 6 |
Nanofabrication Marrian CRK, Tennant DM Journal of Vacuum Science & Technology A, 21(5S), S207, 2003 |
| 7 |
Diffractive x-ray optics using production fabrication methods Stein A, Jacobsen C, Evans-Lutterodt K, Tennant DM, Bogart G, Klemens F, Ocola LE, Choi BJ, Sreenivasan SV Journal of Vacuum Science & Technology B, 21(1), 214, 2003 |
| 8 |
Fabrication methods for a quantum cascade photonic crystal surface emitting laser Tennant DM, Colombelli R, Srinivasan K, Troccoli M, Painter O, Gmachi C, Capasso F, Sergent AM, Sivco DL, Cho AY Journal of Vacuum Science & Technology B, 21(6), 2907, 2003 |
| 9 |
Evaluation of a 100 kV thermal field emission electron-beam nanolithography system Tennant DM, Fullowan R, Takemura H, Isobe M, Nakagawa Y Journal of Vacuum Science & Technology B, 18(6), 3089, 2000 |
| 10 |
Technique for rapid at-wavelength inspection of extreme ultraviolet mask blanks Spector SJ, White DL, Tennant DM, Ocola LE, Novembre AE, Peabody ML, Wood OR Journal of Vacuum Science & Technology B, 17(6), 3003, 1999 |