검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Pattern specific optical models Tejnil E, Adam K, Lam MC, Berger G Journal of Vacuum Science & Technology B, 26(6), 2441, 2008 |
| 2 |
Actinic detection of sub-100 nm defects on extreme ultraviolet lithography mask blanks Jeong ST, Johnson L, Rekawa S, Walton CC, Prisbrey ST, Tejnil E, Underwood JH, Bokor J Journal of Vacuum Science & Technology B, 17(6), 3009, 1999 |
| 3 |
At-wavelength interferometry for extreme ultraviolet lithography Tejnil E, Goldberg KA, Lee SH, Medecki H, Batson PJ, Denham PE, MacDowell AA, Bokor J, Attwood D Journal of Vacuum Science & Technology B, 15(6), 2455, 1997 |
| 4 |
Progress Towards Lambda/20 Extreme-Ultraviolet Interferometry Goldberg KA, Beguiristain R, Bokor J, Medecki H, Attwood DT, Jackson K, Tejnil E, Sommargren GE Journal of Vacuum Science & Technology B, 13(6), 2923, 1995 |