화학공학소재연구정보센터
검색결과 : 14건
No. Article
1 Impact of low-energy ions on plasma deposition of cubic boron nitride
Teii K, Matsumoto S
Thin Solid Films, 576, 50, 2015
2 Mechanism of enhanced wettability of nanocrystalline diamond films by plasma treatment
Yang JHC, Teii K
Thin Solid Films, 520(21), 6566, 2012
3 Enhanced deposition of cubic boron nitride films on roughened silicon and tungsten carbide-cobalt surfaces
Teii K, Hori T, Matsumoto S
Thin Solid Films, 519(6), 1817, 2011
4 Deposition of amorphous hydrogenated carbon films on Si and PMMA by pulsed direct-current plasma CVD
Sung TL, Chao YA, Liu CM, Teii K, Teii S, Hsu CY
Thin Solid Films, 519(20), 6688, 2011
5 In vacuo substrate pretreatments for enhancing nanodiamond formation in electron cyclotron resonance plasma
Teii K, Kouzuma Y, Uchino K
Journal of Vacuum Science & Technology A, 24(5), 1802, 2006
6 Effect of hydrogen plasma exposure on the amount of trans-polyacetylene in nanocrystalline diamond films
Teii K, Ikeda T, Fukutomi A, Uchino K
Journal of Vacuum Science & Technology B, 24(1), 263, 2006
7 Prediction of a threshold density of atomic hydrogen for nanocrystalline diamond growth at low pressures
Teii K
Chemical Physics Letters, 389(4-6), 251, 2004
8 Argon dilution effects on diamond deposition in electron cyclotron resonance plasma: a double probe study
Teii K, Yoshioka H, Ono S, Teii S
Thin Solid Films, 437(1-2), 63, 2003
9 Negative bias dependence of sulfur and fluorine incorporation in diamond films etched by an SF6 plasma
Teii K, Hori M, Goto T
Journal of the Electrochemical Society, 148(2), G55, 2001
10 Study on polymeric neutral species in high-density fluorocarbon plasmas
Teii K, Hori M, Ito M, Goto T, Ishii N
Journal of Vacuum Science & Technology A, 18(1), 1, 2000