검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
In situ conductivity characterization of oxide thin film growth phenomena on microhotplates DiMeo F, Cavicchi RE, Semancik S, Suehle JS, Tea NH, Small J, Armstrong JT, Kelliher JT Journal of Vacuum Science & Technology A, 16(1), 131, 1998 |