검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Oxygen incorporated during deposition determines the crystallinity of magnetron-sputtered Ta3N5 films Rudolph M, Vickridge I, Foy E, Alvarez J, Kleider JP, Stanescu D, Magnan H, Herlin-Boime N, Bouchet-Fabre B, Minea T, Hugon MC Thin Solid Films, 685, 204, 2019 |