검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Microstructure and chemical wet etching characteristics of AlN films deposited by ac reactive magnetron sputtering Tanner SM, Felmetsger VV Journal of Vacuum Science & Technology A, 28(1), 69, 2010 |
| 2 |
Innovative technique for tailoring intrinsic stress in reactively sputtered piezoelectric aluminum nitride films Felmetsger VV, Laptev PN, Tanner SM Journal of Vacuum Science & Technology A, 27(3), 417, 2009 |
| 3 |
Fabrication process for cantilevers with integrated tunnel junctions Tanner SM, Rogers CT Journal of Vacuum Science & Technology B, 26(2), 481, 2008 |