검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Enhanced degradation of gate oxide in negative-gas plasma during reactive ion etching Arita K, Takihara H, Asano T Journal of Vacuum Science & Technology B, 16(2), 670, 1998 |
| No. | Article |
|---|---|
| 1 |
Enhanced degradation of gate oxide in negative-gas plasma during reactive ion etching Arita K, Takihara H, Asano T Journal of Vacuum Science & Technology B, 16(2), 670, 1998 |